Item ID: 103842 1 Offered at Best Price Tokyo Electron Ltd Part Number 13020V-12421-R Unit Price Unstated Number of Units 1 Part Vendor Tokyo Electron Ltd (as Original Eqpt Maker) Part Number 13020V-12421-R Part Description DEPOSITION SHIELD Condition Like New To ORDER this listing, click the Add to Order button below. ORDER # Units (# Units entered will be ADDED to any units already in your order).