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Physical Vapor Deposition Kit Components


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Item IDItem DescriptionPt Description#PriceNotesORDER
# Units
VendorPart#
$
56800 Applied Materia Mfr*0020-24804-R8" Cover Ring 2
56804 Applied Materia Mfr*0020-25917-RInsulator DC Bias (Ceramic) 2
56810 Applied Materia Mfr*0020-29143-RCup. Outer Coil Support 11
56813 Applied Materia Mfr*0020-29329-RClamp Feed Thru Coil Support 3
56817 Applied Materia Mfr*0020-29341-RBar Rf Connector Flat, Vectra- 2
56822 Applied Materia Mfr*0020-29348-RCup. Outer 3
56824 Applied Materia Mfr*0020-29948-RCup, Inner, Coil Sprt 1/8 THK 8
56827 Applied Materia Mfr*0200-20169-RInsulator,Rigid Coil Support 8
56829 Applied Materia Mfr*0200-20170-RCap. Rigid Coil Support 11
56831 Applied Materia Mfr*0200-20175-RLabyrinth Coil Support 7
54950 Applied Materia OEM*:OEM*0020-29409CONDUCTOR, FLEX 4
54955 Applied Materia OEM*:OEM*3880-01004WSHERFLAT #4 SST 1056 1.00
54956 Applied Materia OEM*:OEM*3880-01022WSHERLKG SPLIT #4 24 1.00
99033 Applied Materials Mfr*0020-19706Cover Ring, 200 mm SIP TA/Tan, ESC 1 3,521.78
56644 Applied Materials Mfr*0020-24387Pedestal 6" 101 SST/MATL 3
56801 Applied Materials Mfr*0020-24914-RPVD Kit Components in Process Kit C... 1
56843 Applied Materials Mfr*0020-24959PVD Kit Components in Process Kit C... 1
56807 Applied Materials Mfr*0020-26547-RPVD Kit Components in Process Kit C... 6
56808 Applied Materials Mfr*0020-27205-RPVD Kit Components in Process Kit C... 7
99034 Applied Materials Mfr*0020-28906HUB, DC BIAS MODIFIED SHUTTER 17 172.87
56811 Applied Materials Mfr*0020-29206-RBushing, Rigid Coil Support 6
56819 Applied Materials Mfr*0020-29343-RShield Clamp Darkspace 4
56820 Applied Materials Mfr*0020-29344-RPVD Kit Components in Process Kit C... 4
99064 Applied Materials Mfr*0021-20045-UShield, Darkspace, TA/TAN, AL Arc Spray 13 557.36
56825 Applied Materials Mfr*0021-20096-RPVD Kit Components in Process Kit C... 1
56826 Applied Materials Mfr*0021-20718-RPVD Kit Components in Process Kit C... 2
99065 Applied Materials Mfr*0021-22602Cover-Ring, 8" Moto B101 TI, 10.5" DI 2 2,261.35
56832 Applied Materials Mfr*0200-20208-RLabyrinth Feedthru Coil Support Vectra Imn 4
56839 Applied Materials Mfr*0200-20331-RCover Ring, 8" Bias 2
99095 Applied Materials Mfr*0200-20439Coil, Insulator, Support Rigid 2 130.00
56840 Applied Materials Mfr*0200-24804-R8" Cover Ring 6
54923 Applied Materials OEM*:OEM*0015-20035SCREW, INSULATOR 4
54928 Applied Materials OEM*:OEM*0020-20113HUB DC BIAS, SHI 10 15.00
54930 Applied Materials OEM*:OEM*0020-20114ISOLATER, DC BIA 8 19.00
54947 Applied Materials OEM*:OEM*0020-20119PVD Kit Components in Process Kit C... 4 11.00
54948 Applied Materials OEM*:OEM*0020-20126PVD Kit Components in Process Kit C... 1 27.00
89267 Applied Materials OEM*:OEM*0020-20919COVER PVD POST 1 56.00
51151 Applied Materials OEM*:OEM*0020-21031LIFT PIN 8
89268 Applied Materials OEM*:OEM*0020-23837SPACER 6-12 SOURCE GUIDE PIN 1 71.00
54899 Applied Materials OEM*:OEM*0020-24614SHIELD LOW KNEE TI/AL PRCS SST 6" WFR 1
54902 Applied Materials OEM*:OEM*0020-26439SHIELD LOWER 6'' G12 101 SST DBL KNEE 1 245.00
89286 Applied Materials OEM*:OEM*0021-08111BRKT,SOURCE PIN GUIDE,SIP CU 1 472.00
89292 Applied Materials OEM*:OEM*0021-22576CLAMP FEEDTHRU COIL SUPPORT ELECTRA 2 80.00
54954 Applied Materials OEM*:OEM*3690-02848SCR CAP FLT HD 6-32X1/4L SLOT 82DEG SST SLVR-PLT 5 2.25
56841 Honeywell Mfr*TSVCTISET-07935Vectra Coil Set 26
88740 Novellus Systems, In OEM*:OEM*04-730737-01Shield, Htr Support 1
88735 Novellus Systems, In OEM*:OEM*04-730876-02Shield, Plasma Dome 6
88736 Novellus Systems, In OEM*:OEM*04-732063-01Clamp, ESC WT Notch 2
88741 Novellus Systems, In OEM*:OEM*15-116732-00Sleeve, Insul RF 1
88742 Novellus Systems, In OEM*:OEM*16-117928-00Ring, Anode, HCM 1
88737 Novellus Systems, In OEM*:OEM*16-132471-00Gate Valve Shield (see also 813-045-YA-E4) 4
88739 Novellus Systems, In OEM*:OEM*17-143282-00Shield, Chmbr, Btm, DFE, W/ESC 1
88738 Novellus Systems, In OEM*:OEM*G1-709186-00Cover, Front 1
88743 Novellus Systems, In OEM*:OEM*G17-09090-00Clamp, Wafer, 200 mm 3
88147 TOSOH Mfr*17-177334-00Bracket, Slit Valve 1
88746 TOSOH Mfr*805-058-SG-E4Pedestal Cover, Lower 1
88745 TOSOH Mfr*805-151-TG-E4Shutter, Ti 1
88753 TOSOH Mfr*813-036-YG-E4Wafer Shield DFE 2
88079 TOSOH Mfr*813-039-YG-E4Dep, Clampless Shield 1
88750 TOSOH Mfr*813-041-YA-E4Shield, ESC RF 3
88751 TOSOH Mfr*813-042-CG-E4Ring, Ceramic RF FF 3
88744 TOSOH Mfr*813-043-SM-E4Clamp Weight RF FF 4
88046 TOSOH Mfr*813-045-YA-E4Gate Valve Shield 1
88047 TOSOH Mfr*813-046-YA-E4Ring Anode HCM 2
88080 TOSOH Mfr*813-046-YG-E4Ring Anode HCM Shield 1
88081 TOSOH Mfr*813-047-SG-E4Wt Notch ESC Clamp 1
88048 TOSOH Mfr*813-048-SA-E4HCM Adapter 1
88082 TOSOH Mfr*813-048-SG-E4HCM Adapter Shield 1
88747 TOSOH Mfr*813-058-YG-E4ADVD Shield 3
88754 TOSOH Mfr*813-075-AC-79Source, Cyl Cover 1
88146 TOSOH Mfr*813-099-SA-E4Support Ring 1
88145 TOSOH Mfr*813-4E4KR-SG8" Cu HCM Kit Complete (Inova) 1
88755 TOSOH Mfr*813-5E4-KR-C8" Ceramic Kit 3
88078 TOSOH Mfr*813-8E4KR-SA8" Ta HCM Kit Complete (Inova) K-7 1
88036 TOSOH OEM*:OEM*813-027-CG-E4Cylinder Source, DFE Dovetailed 6
88037 TOSOH OEM*:OEM*813-031-CG-E4Ceramic Ring 1
88038 TOSOH OEM*:OEM*813-032-SG-E4Bottom Shield 1
88039 TOSOH OEM*:OEM*813-033-SG-E4Side Shield 2
88040 TOSOH OEM*:OEM*813-034-SG-E4Nut Front Dide Shield 1
88041 TOSOH OEM*:OEM*813-035-SG-E4Shield End Right Chamber 1
88042 TOSOH OEM*:OEM*813-037-SG-E4Elb, Bsg Prg Shield DFE w/ESC 1
88043 TOSOH OEM*:OEM*813-075-AG-E4CVR, Source Cyl w/ handles 1
88044 TOSOH OEM*:OEM*813-083-SGScrew Shield 1
88034 TOSOH OEM*:OEM*SET-813-1E4KR-SG8" Damaclean Kit Complete for Inova 2

*  Vendor Role: OEM is Original Equipment Manufacturer; Sup is Supplier/Distributor

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.