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Etch Process Kit Components


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  •  
    Item IDItem DescriptionPt Description#PriceNoteORDER
    # Units
    VendorPart#
    $
    99031 AMAT Mfr*0020-18347ELECTRODE, GROUND - NEW EXTERN3474.23
    48961 Applied Materia Mfr*0020-03426Plug, Vespel1255.00
    55305 Applied Materia Mfr*0020-03656SCREW, Vespel3
    51155 Applied Materia Mfr*0020-03664PEDESTAL 1749.00
    55304 Applied Materia Mfr*0020-03697SCREW, 6, FLTHEAD, Vespel63
    51156 Applied Materia Mfr*0020-04143SLEEVE, CENTERING CLAMPING RING 219.00
    51159 Applied Materia Mfr*0020-04160SPACER, CIRCULAR EXT CATH7349.00
    51161 Applied Materia Mfr*0020-04277FLANGE, INSULATING TAPER EXT CATHODE 3359.00
    55302 Applied Materia Mfr*0020-30570Plate Gas Distribution 1503450.00
    55069 Applied Materia Mfr*0020-31919Plug, DC, ESC6
    51167 Applied Materia Mfr*0020-41153HOLDER PIN E-CHUCK 489.00
    51171 Applied Materia Mfr*0200-09222RING, EXT QUARTZ 8" 32
    51174 Applied Materia Mfr*0200-09636Etch Kit Components in Process Kit ...3478.00
    54739 Applied Materia OEM*:OEM*0020-03379GAS DISTRIBUTION PLATE4255.00
    54769 Applied Materia OEM*:OEM*0020-09963Etch Kit Components in Process Kit ...16
    54773 Applied Materia OEM*:OEM*0020-30819SCREW MACH 8-32X.18 BUTTON HEAD VESPEL1055.00
    54786 Applied Materia OEM*:OEM*3320-01041GSKT SHLD RF .125DIA 10LB/LIN-IN MOD-FORCE BC TIN10
    56756 Applied Materials Mfr*0015-00013FLEX COUPLING, MOD1120.00
    55307 Applied Materials Mfr*0020-09912Lift Pin, Sputter14
    99039 Applied Materials Mfr*0020-31147-UINSERT, BASE, ALUM, 150/200MMFLAT1548.41
    55071 Applied Materials Mfr*0020-31397Bushing, Centering7
    54790 Applied Materials Mfr*0020-31548GDP 133 HOLE METAL2
    58142 Applied Materials Mfr*0020-31548-RPLATE, GAS DISTRIBUTION-REPAIR20
    55310 Applied Materials Mfr*0020-31632Etch Kit Components in Process Kit ...3
    99041 Applied Materials Mfr*0020-31767CYLINDER, CLAMPING, POLY/WSI, 200MM71,010.75
    99042 Applied Materials Mfr*0020-32047Pedestal, lower, ext, Post226.03
    99043 Applied Materials Mfr*0020-32962Insert, Outer, Nickel, HV Center ESC2130.36
    99044 Applied Materials Mfr*0020-32963Cover, Back, HV-Center, ESC2379.76
    51165 Applied Materials Mfr*0020-33166SHIM, BASE CATHODE1175.00
    99051 Applied Materials Mfr*0020-41023Washer, Insert PROC CHMR610.84
    56297 Applied Materials Mfr*0021-09718-RLINER, SLIT VALVE MXP+1
    99067 Applied Materials Mfr*0021-35096POLY CLAMP CARRIER, 5200 SYSTEM4760.50
    55313 Applied Materials Mfr*0200-00062RING, WRAP AROUND COVER, QTZ 4,5,&6"1
    99086 Applied Materials Mfr*0200-09217RING, QUART, 8"", EXT CATHMETAL, NOTCH4301.11
    51176 Applied Materials Mfr*0200-09977Cover, Quartz 1985.00
    99089 Applied Materials Mfr*0200-10210WINDOW, SAPPHIRE GECO5702.65
    99091 Applied Materials Mfr*0200-10377-URing, Single 195mmSemi NT CER DPS CHMB (11,375.00
    99098 Applied Materials Mfr*0200-35334WINDOW, VIEW, POLY DPS(Quartz) obsolete140.00
    99105 Applied Materials Mfr*0200-36697Top Ring Silicon 200 MM Notch (2) oxide61,475.00
    104201 Applied Materials OEM*:OEM*0010-00706CLAMP RING, XTAL, 6 ASSY12,200.00
    54767 Applied Materials OEM*:OEM*0020-04345INSULATOR HEXODE, ANTIARC789.00
    54771 Applied Materials OEM*:OEM*0020-10941ISOLATOR TEFLON RING2379.00
    89428 Applied Materials OEM*:OEM*0020-30028SCREW, VESPEL, GROOVED4038.00
    54772 Applied Materials OEM*:OEM*0020-30228SCREEN, PLASMA139.00
    54903 Applied Materials OEM*:OEM*0020-31493-REtch Kit Components in Process Kit ...7
    54776 Applied Materials OEM*:OEM*0020-31628Etch Kit Components in Process Kit ...6
    55062 Applied Materials OEM*:OEM*0020-31765STANDOFF, VESPEL7
    89270 Applied Materials OEM*:OEM*0020-33646CLAMP,TAPERED FINGERS, VESPEL,DIELECTRIC3949.00
    104206 Applied Materials OEM*:OEM*0021-09097PLATE, LINER ALIGNMENT, VESPEL2255.00
    104207 Applied Materials OEM*:OEM*0021-09098Etch Kit Components in Process Kit ...1265.00
    54779 Applied Materials OEM*:OEM*0040-00290Etch Kit Components in Process Kit ...2150.00
    89297 Applied Materials OEM*:OEM*0040-09798SHELL ASSY 200MM NOTCH ESC22,165.00
    89375 Applied Materials OEM*:OEM*0200-00055RING,QUARTZ COVER,200MM OXIDE1411.00
    89376 Applied Materials OEM*:OEM*0200-00055-SRING,QUARTZ COVER,200MM OXIDE5316.00
    89378 Applied Materials OEM*:OEM*0200-09177200 MM, WRAP AROUND, COVER, QUARTZ1983.00
    89379 Applied Materials OEM*:OEM*0200-09177-S200 MM, WRAP AROUND, COVER, QUARTZ2756.00
    89380 Applied Materials OEM*:OEM*0200-09187COVER, QTZ, 8 EXT POLY2538.00
    89381 Applied Materials OEM*:OEM*0200-09187-SCOVER, QTZ, 8 EXT POLY3414.00
    89383 Applied Materials OEM*:OEM*0200-09241-SCOVER WLDMENT,FOCUS RING2695.00
    54782 Applied Materials OEM*:OEM*0200-09830RING PEDESTAL, ESC 150MM 1FL WEB3729.00
    51177 LAM Mfr*715-007567-001BAFFLE, UPPER 1
    56752 LAM Mfr*715-011531-015Etch Kit Components in Process Kit ...4
    56753 LAM Mfr*715-011640-006RING FOCUS ANODIZED7
    51178 LAM Mfr*715-140124-001Etch Kit Components in Process Kit ...1
    51179 LAM Mfr*715-140126-001BAFFLE, MIDDLE 1249.00
    51180 LAM Mfr*715-443223-002RING, GROUND AL HP 2
    51182 LAM Mfr*716-008645-001Etch Kit Components in Process Kit ...5495.00
    56751 LAM Mfr*716-011651-006RING, EDGE, WAFER CLAMP, 6.002
    56747 LAM Mfr*716-011830-006FOCUS RING, 6"1
    51185 LAM Mfr*716-028123-002RING, FILLER (CERAMIC) 11,795.00
    51188 LAM Mfr*716-330190-081RING, CERAMIC FOCUS 9600 11,349.00
    56739 LAM Mfr*716-443086-401-AEtch Kit Components in Process Kit ...1
    51190 LAM Mfr*716-443189-002COVER, QUARTZ EXELAN 19
    51192 LAM Mfr*716-443230-002RING, CONFINEMENT QUARTZ 3
    51197 LAM Mfr*839-443215-502Etch Kit Components in Process Kit ...2
    54876 LAM OEM*:OEM*715-028615-001-RPLATE, UPR BAFFLE 8IN EDGE BLT13
    54904 LAM OEM*:OEM*716-330122-002PLATE, TOP, CER F/G2


    *  Vendor Role: OEM is Original Equipment Manufacturer; Sup is Supplier/Distributor
    NOTE:
       when photo available
       when document attached
      F* if the item is specially featured
      N* if the item is newly added, and/or
      R* if the item's price is recently reduced.